| Identification | |
| Name: | chloro(fluoro)silane |
| Synonyms: | Chloro(fluoro)silane;silane, chlorofluoro- |
| CAS: | 80003-41-4 |
| Molecular Formula: | H2ClFSi |
| Molecular Weight: | 84.5528 |
| InChI: | InChI=1/ClFH2Si/c1-3-2/h3H2 |
| Molecular Structure: |  |
| Properties | |
| Safety Data | |
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