| Identification | |
| Name: | Silane, fluoro- |
| Synonyms: | Fluorosilane;Monofluorosilane; Monofluorosilane (SiH3F); Silyl fluoride; Silyl fluoride(SiH3F) |
| CAS: | 13537-33-2 |
| EINECS: | 236-909-6 |
| Molecular Formula: | FH3 Si |
| Molecular Weight: | 50.1077232 |
| InChI: | InChI=1/FH3Si/c1-2/h2H3 |
| Molecular Structure: |  |
| Properties | |
| Safety Data | |
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