| Identification | |
| Name: | TRIS(DIMETHYLSILYL)AMINE |
| CAS: | 21331-86-2 |
| EINECS: | 244-336-8 |
| Molecular Formula: | C6H21NSi3 |
| Molecular Weight: | 191.49 |
| InChI: | InChI=1/C6H18NSi3/c1-8(2)7(9(3)4)10(5)6/h1-6H3 |
| Molecular Structure: |  |
| Properties | |
| Flash Point: | 46.3°C |
| Density: | 0,804 g/cm3 |
| Refractive index: | 1.423 |
| Flash Point: | 46.3°C |
| Safety Data | |
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